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VCSELs – Plasma Technologies and Solutions

VCSELs enable technologies such as 3D sensing, gesture recognition, and LIDAR for autonomous (self-driving) vehicles. Face recognition, powered by 3D sensing, has been adopted by several high-end smartphone manufacturers and opened a path for multiple new applications. These applications are now driving a shift from low-power to high-power operation for VCSELs. VCSELs (vertical-cone surface-emitting lasers) are used as an infra-red light emitter to illuminate the object to sense. They make ideal light sources for this application because of their unique device properties, including low beam divergence, temperature stability and low power consumption. Advanced plasma processing solutions can be achieved through our PlasmaPro 100 platform, which has been configured for high volume manufacturing up to 200mm wafer size. Our CVD and ICP/RIE solutions include various steps such as masking, passivation, mesa or isolation. Oxford Instruments has a long history of working closely with the Compound Semiconductor community to deliver maximum device performance and manufacturing efficiency. Find out more at https://plasma.oxinst.com/campaigns/m...