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MEMS - High Sensitivity, Cantilever Based Sensors - Multiple Applications 10 лет назад


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MEMS - High Sensitivity, Cantilever Based Sensors - Multiple Applications

http://www.panoramasynergy.com.au/IRM... There are many applications where accurate chemical and biological sensing is required. Medical sensors can be used to diagnose lung cancers or melanomas. The ability to detect leakage of toxic and inflammable gases in various environments is also desirable. MEMS cantilever based sensors have the potential to fill this need. This technology provides a highly sensitive readout solution. There is no need to electrically actuate the cantilever. This opens up the potential for optical sensing which will be of particular use for sensors in hazardous environments such as explosive gas sensing for pipelines and mine sites or aircraft applications where RF interference must be minimized.

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